Products
E-CPA-XY （coplanar air bearing XY Stage）
| Specification | | 300×300 | 400×400 |
| Motor type | Three-phase iron core motor | |
| Grating resolution | 1vpp Analog value can be subdivided up to 1nm (absolute value optional) | |
| X-axis motor thrust[N] | Continuous 40N Peak 90N | |
| Y-axis motor thrust [N] | Continuous 40N*2 Peak 90N*2 | |
| Upper axis no-load acceleration [g] | 1.5G | |
| Lower axis no-load acceleration [g] | 1.5G | |
| Mini step length [nm] | 10nm(With nanopwm or linear driver ) | |
| Travel [mm] | 300×300 | 400×400 |
| Repeat positioning accuracy [um] | ±0.05 | ±0.05 |
| Positioning accuracy [um] | ±0.3 | ±0.35 |
| Flatness [um] | 1 | 1.5 |
| Straightness [um] | 0.5 | 1 |
| pitch[urad] | 10 | 10 |
| yaw[urad] | 5 | 5 |
| Maximum speed [mm/s] | 500mm/s | |
| Maximum load[kg] | 30kg | |
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