The μSCAN series scanning system is a high-performance integrated system recently launched by our company. The whole machine uses high-rigidity granite as the base, cooperates with high-performance linear motors and servo platforms, and is mainly used for high-precision scanning, processing, testing and other applications. The selection of standard stroke parameters supports fast delivery, which greatly reduces the combination defects caused by the customer’s unfamiliarity with the combination and the performance shortcomings caused by the unfamiliarity with the debugging.