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E-TRI Series E-TRI-VM-R1 Parallel Motion Stage
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
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E-HEX-90.6.60.60 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
6-Axis Hexapod Tri-pod structer E-HEX-10.6.100.100-XXX Series Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages
Features:
High precision, can be assembled, can be customized, light aperture 460mmDelivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path. -
E-LMT-XYZ (high precision Integrated combination XYZ Axis stage)
Elevation Stage with Excellent Straightness and Flatness of MotionThe vertical stage platform design provides excellent straightness and flatness, with better pitch and yawperformance compared to vertically mounted linear positioning stages, where the cantilevered load can causedeflections in the supporting linear bearings.High Resolution Linear Motion with voice Servo MotorsE-ABVT-Z is internally driven by a voice coil motor, equippedwith an air-floating transfer rail (cross ball guide rails can also be used), and uses a high-resolution grating to closethe loop, and is equipped with a high-performance driver to ensure the minimum displacement and repeatability ofthe positioning stage. achieve great performance.Computer Control, Software, Programming -
HEX-S5.10.60-XXX Series parallel motion platform six free motion stages
The six-degree-of-freedom parallel motion design makes it more compact and rigid than a series motion system, with a greater dynamic range and no moving cables: more stable and less friction
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E-LMT-XYZ (high precision linear motor XYZ Axis stage
Elevation Stage with Excellent Straightness and Flatness of MotionThe vertical stage platform design provides excellent straightness and flatness, with better pitch and yawperformance compared to vertically mounted linear positioning stages, where the cantilevered load can causedeflections in the supporting linear bearings.High Resolution Linear Motion with voice Servo MotorsE-ABVT-Z is internally driven by a voice coil motor, equippedwith an air-floating transfer rail (cross ball guide rails can also be used), and uses a high-resolution grating to closethe loop, and is equipped with a high-performance driver to ensure the minimum displacement and repeatability ofthe positioning stage. achieve great performance.Computer Control, Software, Programming -
E-TRI-R5 Three-axis parallel leveling platform
Parallel-kinematic design for three degrees of freedom, making it significantly more compact and stiff than serial-kinematic systems, higher dynamics, no moved cables: Higher reliability, reduced friction.
TRI axis parallel motion stages
It is our company’s specialty product. Compared with other high-end multi-degree-of-freedom platforms, we have a high cost performance.
The three axes adopt a parallel structure, and each axis can be equipped with a stepper motor or servo motor. The unique control algorithm inside the controller achieves high-precision control;
Optimize the rigidity of the overall system;
There may be a clear aperture in the middle of the platform;
Suitable for: scientific research, micromanipulation, biotechnology, semiconductor manufacturing, etc.
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E-MST-XY 205X205 Industrial measurement microscope scanning stage
industrial microscope linear motor platform is a product specially designed and developed for mainstream research-level inverted microscopes.
It has the advantages of better precision, faster response, higher speed and longer life. Moreover, since the linear motor is a non-contact direct drive mechanism, it is almost noiseless, and is a traditional display motor.
An optimized and upgraded product of the micromirror platform. -
E-MST-XY-110X110 Industrial measurement microscope scanning stage
industrial microscope linear motor platform is a product specially designed and developed for mainstream research-level inverted microscopes.
It has the advantages of better precision, faster response, higher speed and longer life. Moreover, since the linear motor is a non-contact direct drive mechanism, it is almost noiseless, and is a traditional display motor.
An optimized and upgraded product of the micromirror platform. -
MiniSCAN desktop scanning stage
iniSCAN series MiniSCAN series is a high-precision desktop scanning system recently launched by our company. The whole machine adopts a marble base with excellent stability, equipped with high-precision XY and Z-axis motion stages, and has reserved light path installation and lighting. The mechanism can be very quickly combined into various applications that meet customer requirements. Currently, it has very successful application cases in high-precision applications such as semiconductor wafer scanning, biological detection, and interferometer measurement. Main features of MiniSCAN series Standard desktop-level vibration isolation system Three-axis optional high-precision linear motor or high-stability stepper motor motion stage The drive control system has been embedded in the entire machine structure, no additional control box is required Customized lighting and imaging mechanisms can be selected according to customer requirements Optional high-precision ranging module to achieve 0.2um level autofocus Optional standard control software, as well as a complete, rich and fast secondary development package
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E-LMTE390-XY-330X330 Large travel hollow linear motor stage
It is used in large hollow microscopes and is widely used in semiconductor inspection.
