6-Axis Hexapod Tri-pod structer E-HEX-10.6.100.100-XXX Series Parallel six degrees of freedom stages

Short Description:

Features:
High precision, can be assembled, can be customized, light aperture 460mm

Delivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path.

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Product Detail

SPECIFICATION

Product Tags

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Specification	XY	θXθY	Z	θZ
Travel	±50mm	±3deg	±50mm	±5deg
Motor type	Linear Motors	Linear Motors	Linear Motors	Direct drive motor
Opticval Encode resolution	4.88nm（1vpp）	4.88nm（1vpp）	4.88nm（1vpp）	0.04sec
Minimum step size	100nm	0.3sec	100nm	0.1sec
Repeatability	±0.2um	±1sec	±0.3um	±1sec
Positioning accuracy	±1um	-	±1um	±5sec
Maximum speed [mm/s]	100mm/s	30deg/sec	15mm/s	4rps
Maximum load [kg]	Horizontal load: 10kg, please contact the manufacturer for vertical load
Max mass	20kg