Specification | XY axis | θXθY axis | Z axis | θZ axis |
Travel | ±100mm | ±3deg | ±25mm | 360deg |
Motor type | stepper motor | stepper motor | stepper motor | direct drive motor |
Grating resolution | 4.88nm(1vpp) | 4.88nm(1vpp) | 4.88nm(1vpp) | 0.04sec |
Minimum step size | 50nm | 0.01ec | 50nm | 0.001sec |
Repeatability Accuracy [um] | ±0.5um | ±0.5sec | ±0.3um | ±0.1sec |
Accuracy [um] | ±1um | ±2sec | ±1um | ±3sec |
Maximum speed | 100mm/s | 30deg/sec | 15mm/s | 4rps |
Max load capacity [kg] | Horizontal load 300kg, vertical use load please contact the manufacturer | |||
Weight | 750kg |