Specifcation | X-axis | Y-axis |
Motor type | Dual linear motor drive | |
Raster resolution | sincos 4.88nm(Optional absolute value or higher resolution) | |
Motor thrust | Continuous 60N/Peak 210N | Continuous 120N/Peak 420N |
Minimum step size [nm] | 50nm(Paired with nanopwm or linear driver) | |
Travel [mm] | 330 | 330 |
Repeatability | ±0.25 | |
Positioning accuracy [um] | ±1(Interferometer calibration) | |
Flatness [um] | ≤±2.5um | |
Straightness [um] | ≤±1.5um | ≤±2um |
Maximum speed [mm/s] | 1000 | |
Maximum acceleration [g] no load | 1.5g(X alex)1g(Y alex) | |
Maximum load [kg] | 30 |