Air bearing stages

Air bearing stages

  • E-MCPA-XY  (Small linear motor coplanar air bearing Stage
  • E-CPA-XY  (coplanar air bearing  XY Stage)

    E-CPA-XY (coplanar air bearing XY Stage)

    The X-axis beam is made of alumina ceramics. Compared with marble beams, ceramic beams have better accuracy, stability and wear resistance.

     

     

     

     

     

  • EABRX-M 200 Air Bearing rotation stage

    EABRX-M 200 Air Bearing rotation stage

    Surface metrology, including the measurement of roundness, flatness, and form error
    •Micro- and nanotomography
    •Beamline and synchrotron research
    •Precision manufacturing, including diamond turning, grinding and other high-performance machine tool
    applications
    •Optical alignment, inspection and calibration systems
    •Engineered for Precision
    •The EABRX  series is meticulously engineered to consistently satisfy even the most stringent performance
    requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error
    motion performance with high stiffness and load-carrying capabilities.

  • EC-ABL140-X series (economical magnetic preload series)  Ultra-thin one-dimensional air flotation motion stage

    EC-ABL140-X series (economical magnetic preload series) Ultra-thin one-dimensional air flotation motion stage

    ● Travel ranges to 100mm to 400 mm

    ● Load capacity 10  kg

    ● Air-Bearing Design

    ● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing

    ● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.

     

     

     

     

  • EC-ABL260-X Series (economical magnetic preload series)

    EC-ABL260-X Series (economical magnetic preload series)

    ● Travel ranges to 200mm to 600 mm

    ● Load capacity 25 kg

    ● Air-Bearing Design

    ● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing

    ● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.

     

     

     

  • E-ABW400-X One-dimensional air floating platform

    E-ABW400-X One-dimensional air floating platform

    ● Ideal for scanning applications or high-precision positioning

    ● Cleanroom compatible

    ● Size of the motion platform 400 mm × 138 mm

    ● Travel ranges 200 mm to 1000 mm

    ● Resolution to 5 nm

     

     

  • EABRX-M150 Air Bearing rotation stage

    EABRX-M150 Air Bearing rotation stage

    Surface metrology, including the measurement of roundness, flatness, and form error
    •Micro- and nanotomography
    •Beamline and synchrotron research
    •Precision manufacturing, including diamond turning, grinding and other high-performance machine tool
    applications
    •Optical alignment, inspection and calibration systems
    •Engineered for Precision
    •The EABRX  series is meticulously engineered to consistently satisfy even the most stringent performance
    requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error
    motion performance with high stiffness and load-carrying capabilities.
  • E-ABR80 Unpowered air bearing rotary stage

    E-ABR80 Unpowered air bearing rotary stage

    Design Features
    •Delivers best-in-class rotational motion, helping you to optimize your high-precision
    process
    •Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-
    processing of parts and measurement data
    •Provides generous load-carrying capacity without compromising on motion quality
    •Integrates easily into precision systems and machines due to compact, lightweight
    form factor, as well as horizontal and vertical mounting and load-carrying capabilities
  • E-ABR100 Unpowered air bearing rotary stage

    E-ABR100 Unpowered air bearing rotary stage

    ● Cleanroom compatible

    ● Motion platform diameter from 100 mm to 300 mm

    ● Eccentricity and flatness < 100 nm

    ● Can be mounted vertically or horizontally

    ● Design Features

    ● Delivers best-in-class rotational motion, helping you to optimize your high-precision process

    ● Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data

  • EAB-B100 series Rotary air bearing stages

    EAB-B100 series Rotary air bearing stages

    •Cleanroom compatible
    •Can be mounted vertically or horizontally
    •direct-drive, rotary air-bearing stages
    •Analog and digital position feedback
    Product overview
    Delivers best-in-class rotational motion, helping you to optimize your high-precision process
    Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and
    measurement data
    Offers excellent positioning performance and velocity stability with high-resolution feedback
    Features a novel, non-influencing motor design that contributes to ultra-precise motion performance
    Provides generous load-carrying capacity without compromising on motion quality
    Integrates easily into precision systems and machines due to compact, lightweight form factor, as well as horizontal and
    vertical mounting and load-carrying capabilities
  • E-ABR250 Rotary air bearing stages

    E-ABR250 Rotary air bearing stages

    This series is meticulously engineered to consistently satisfy even the most stringent performance
    requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error
    motion performance with high stiffness and load-carrying capabilities.
    •Simple, Straightforward Integration
    •E-3R-NGfeatures an advanced bearing design that provides excellent stiffness and high load capacity, while
    maintaining compact overall dimensions and reasonably low overall mass. This makes E-3R-NG ideal to use
    as a component stage in multi-axis motion systems and precision turnkey machines. E-3R-NG stages can be
    mounted with the axis of rotation oriented either vertically or horizontally
  • EAB-B250 series Rotary air bearing stages

    EAB-B250 series Rotary air bearing stages

    •Cleanroom compatible
    •Can be mounted vertically or horizontally
    •direct-drive, rotary air-bearing stages
    •Analog and digital position feedback
    Product overview
    Delivers best-in-class rotational motion, helping you to optimize your high-precision process
    Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and
    measurement data
    Offers excellent positioning performance and velocity stability with high-resolution feedback
    Features a novel, non-influencing motor design that contributes to ultra-precise motion performance
    Provides generous load-carrying capacity without compromising on motion quality
    Integrates easily into precision systems and machines due to compact, lightweight form factor, as well as horizontal and
    vertical mounting and load-carrying capabilities
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