STRIGHT-MASTER-CR (STM-S200) Air Bearing Linear Guide

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STRIGHT-MASTER-CR (STM-S200) Air Bearing Linear Guide

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Core Features

  • High Precision Motion: Delivers exceptional straightness performance of 0.5 μm + 0.5×10⁻⁶ L, with flatness matching straightness when using 3-point leveling pads, ensuring consistent accuracy across the full travel range.
  • Vacuum Preload Design: Uses vacuum preloading for stable, rigid performance, eliminating mechanical play and providing high resistance to torque loads (up to 1.5 Nm).
  • Dual-Axis Compatibility: Supports both horizontal and vertical straightness measurement, making it versatile for multi-directional metrology tasks.
  • Durable Ceramic Structure: High-stiffness ceramic rail (120×200 mm cross-section) ensures long-term stability and low thermal expansion.
  • Efficient Air Consumption: Operates at 6 L/min plus 40 L/min for the vacuum generator, balancing performance with operational efficiency.

Applications

  • Precision metrology and calibration systems
  • Coordinate measuring machines (CMMs)
  • Large-scale linear motion inspection equipment
  • Semiconductor manufacturing and inspection
  • High-precision optical scanning and alignment
  • Aerospace and automotive component testing

 

 

 

 


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