Product Detail
Product Tags
Core Features
- High Precision Motion: Delivers exceptional straightness performance of 0.5 μm + 0.5×10⁻⁶ L, with flatness matching straightness when using 3-point leveling pads, ensuring consistent accuracy across the full travel range.
- Vacuum Preload Design: Uses vacuum preloading for stable, rigid performance, eliminating mechanical play and providing high resistance to torque loads (up to 1.5 Nm).
- Dual-Axis Compatibility: Supports both horizontal and vertical straightness measurement, making it versatile for multi-directional metrology tasks.
- Durable Ceramic Structure: High-stiffness ceramic rail (120×200 mm cross-section) ensures long-term stability and low thermal expansion.
- Efficient Air Consumption: Operates at 6 L/min plus 40 L/min for the vacuum generator, balancing performance with operational efficiency.
Applications
- Precision metrology and calibration systems
- Coordinate measuring machines (CMMs)
- Large-scale linear motion inspection equipment
- Semiconductor manufacturing and inspection
- High-precision optical scanning and alignment
- Aerospace and automotive component testing
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E-NZH-620 6-Axis Parallel Kinematic Hexapod Stage
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