E-NZH-620 6-Axis Parallel Kinematic Hexapod Stage

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E-NZH-620 6-Axis Parallel Kinematic Hexapod Stage

Short Description:

The E-NZH-620 is a high-precision 6-degree-of-freedom (6-DOF) parallel kinematic hexapod stage, engineered for ultra-precision multi-axis positioning and alignment tasks. Powered by permanent magnet synchronous motors, it delivers exceptional accuracy, repeatability, and stiffness in a compact, rigid design.

 

 


Product Detail

Specification

Product Tags

Key Features
High Precision & Repeatability: Achieves ±0.1 µm linear repeatability and sub-microradian angular repeatability, making it ideal for ultra-fine alignment tasks.
Parallel Kinematic Design: Offers higher stiffness, better dynamic performance, and zero moving cables compared to serial kinematic systems, reducing friction and improving reliability.
High Load & Holding Force: Supports up to 30 kg payloads, with a power-off holding force of 300 N, ensuring safety and stability during power outages.
Compact & Durable Construction: Made of stainless steel and aluminum for high rigidity and corrosion resistance, with a low mass of only 11 kg.
Wide Operating Temperature: Designed to operate reliably in environments from -10°C to 50°C.
Applications
Semiconductor manufacturing and wafer alignment
Precision optical component assembly and testing
Micro-assembly and packaging in electronics
Biotechnology and life science research
Aerospace component calibration
High-precision multi-axis metrology systems
SEO Keywords for the SH-620 Hexapod Stage
Core Product Keywords
6-Axis Hexapod Stage
6-DOF Parallel Kinematic Positioning Stage
High Precision Hexapod Alignment Stage
Multi-Axis Precision Positioner
SH-620 Hexapod Stage
Feature-Focused Keywords
±0.1 µm Repeatability Hexapod Stage
30 kg Load Hexapod Positioner
High Stiffness Parallel Kinematic Stage
Permanent Magnet Motor Hexapod Stage
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Application & Commercial Keywords
Hexapod Stage for Semiconductor Alignment
Precision 6-Axis Stage for Optical Metrology
Industrial Hexapod Positioning Stage Price
Affordable High Precision Hexapod Stage
Vacuum-Compatible Hexapod Stage for Research


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  • Specification Parameter Value Unit
    Translation Travel (X/Y/Z) Stroke Range ±25 / ±27.5 / ±14 mm
    Minimum Incremental Motion (X/Y) 0.3 µm
    Minimum Incremental Motion (Z) 0.25 µm
    Repeatability (X/Y/Z) ±0.25 / ±0.5 / ±0.1 µm
    Backlash (X/Y/Z) 2003/3/1 µm
    Max Speed (X/Y/Z) 2.5 mm/s
    Rotation Travel (θX/θY/θZ) Stroke Range ±10.5 / ±11.5 / ±19 °
    Minimum Incremental Motion (θX/θY) 3.5 µrad
    Minimum Incremental Motion (θZ) 4 µrad
    Repeatability (θX/θY/θZ) ±2 / ±2 / ±2.5 µrad
    Backlash (θX/θY/θZ) 20 / 20 / 25 µrad
    Max Speed (θX/θY/θZ) 27 mrad/s
    Mechanical Performance Stiffness (X/Y/Z) 1.7 / 1.7 / 7 N/µm
    Load Capacity (Horizontal/Any Direction) 30/15 kg
    Holding Force (Power-Off) 300/150 N
    Motor Type Permanent Magnet Synchronous Motor -
    Other Operating Temperature -10~50 °C
    Material Stainless Steel, Aluminum -
    Mass 11 kg

     

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