
Key Features
High Precision & Repeatability: Achieves ±0.1 µm linear repeatability and sub-microradian angular repeatability, making it ideal for ultra-fine alignment tasks.
Parallel Kinematic Design: Offers higher stiffness, better dynamic performance, and zero moving cables compared to serial kinematic systems, reducing friction and improving reliability.
High Load & Holding Force: Supports up to 30 kg payloads, with a power-off holding force of 300 N, ensuring safety and stability during power outages.
Compact & Durable Construction: Made of stainless steel and aluminum for high rigidity and corrosion resistance, with a low mass of only 11 kg.
Wide Operating Temperature: Designed to operate reliably in environments from -10°C to 50°C.
Applications
Semiconductor manufacturing and wafer alignment
Precision optical component assembly and testing
Micro-assembly and packaging in electronics
Biotechnology and life science research
Aerospace component calibration
High-precision multi-axis metrology systems
SEO Keywords for the SH-620 Hexapod Stage
Core Product Keywords
6-Axis Hexapod Stage
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SH-620 Hexapod Stage
Feature-Focused Keywords
±0.1 µm Repeatability Hexapod Stage
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Application & Commercial Keywords
Hexapod Stage for Semiconductor Alignment
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| Specification | Parameter | Value | Unit |
| Translation Travel (X/Y/Z) | Stroke Range | ±25 / ±27.5 / ±14 | mm |
| Minimum Incremental Motion (X/Y) | 0.3 | µm | |
| Minimum Incremental Motion (Z) | 0.25 | µm | |
| Repeatability (X/Y/Z) | ±0.25 / ±0.5 / ±0.1 | µm | |
| Backlash (X/Y/Z) | 2003/3/1 | µm | |
| Max Speed (X/Y/Z) | 2.5 | mm/s | |
| Rotation Travel (θX/θY/θZ) | Stroke Range | ±10.5 / ±11.5 / ±19 | ° |
| Minimum Incremental Motion (θX/θY) | 3.5 | µrad | |
| Minimum Incremental Motion (θZ) | 4 | µrad | |
| Repeatability (θX/θY/θZ) | ±2 / ±2 / ±2.5 | µrad | |
| Backlash (θX/θY/θZ) | 20 / 20 / 25 | µrad | |
| Max Speed (θX/θY/θZ) | 27 | mrad/s | |
| Mechanical Performance | Stiffness (X/Y/Z) | 1.7 / 1.7 / 7 | N/µm |
| Load Capacity (Horizontal/Any Direction) | 30/15 | kg | |
| Holding Force (Power-Off) | 300/150 | N | |
| Motor Type | Permanent Magnet Synchronous Motor | - | |
| Other | Operating Temperature | -10~50 | °C |
| Material | Stainless Steel, Aluminum | - | |
| Mass | 11 | kg |