Specification | LMT-XY-200X200 | NFZ10 |
Motor type | Three-phase ironless motor | Voice coil motor |
Resolution | Default 100nm digital (optional 1vpp analog or other resolution) | |
Motor thrust | Continuous 60N/peak 210N | Continuous 30N/peak 90N |
Minimum step size[nm] | 200nm | 200nm |
Travel [mm] | 200×200 | 10 |
Repeatability [um] | ±0.3 | |
Position Accuracy [um] | ±1 | ±0.5 |
Flatness [um] | 10um | 8um |
Straightness [um] | 1um | 1.5um |
Max speed [mm/s] | 500mm/s | 50mm/s |
Load Capacity [kg] | 5kg(Z axis with pneumatic constant force balance weight) |