E-NZH-610 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform

2. Key Features

✅ Multi-Axis Precision Control

Linear Motion: ±16 mm (X), ±17 mm (Y), ±6.5 mm (Z) travel, with minimum displacement as low as 0.08 μm (Z-axis) and repeatability down to ±0.06 μm.
Rotational Motion: ±10° (θX/θY), ±21° (θZ) travel, with minimum displacement down to 2.5 μrad and repeatability as low as ±2 μrad.
Low Backlash: 0.2 μm (X/Y), 0.06 μm (Z), and 2–4 μrad (rotational axes), ensuring precise, hysteresis-free positioning.

✅ High Stiffness & Load Capacity

Stiffness: 0.7 N/μm (X/Y) and 8 N/μm (Z), delivering exceptional rigidity for stable performance under load.
Load Handling: Supports up to 5 kg (vertical) / 2.5 kg (arbitrary direction), with 15 N holding force when powered off to secure the load during power loss.

✅ Dynamic Performance

Speed: Max linear speed 20 mm/s, typical speed 10 mm/s; max rotational speed 500 mrad/s, typical speed 260 mrad/s.
Drive System: Permanent magnet synchronous motors for high efficiency, smooth motion, and precise control.

✅ Compact & Reliable Design

Material: Stainless steel and aluminum construction, balancing strength, corrosion resistance, and light weight (only 2.2 kg).
Operating Temperature: 0–50 °C, suitable for standard laboratory and industrial environments.
Low Maintenance: Closed-loop design with high repeatability ensures long-term stability without frequent calibration.

3. Core Advantages (Unique Selling Points)

Sub-Micron Precision Across All Axes: Delivers exceptional resolution and repeatability for both linear and rotational motion, critical for alignment and testing applications.
Optimized Z-Axis Performance: With 0.08 μm minimum displacement, ±0.06 μm repeatability, and 8 N/μm stiffness, the Z-axis is tailored for high-precision focusing and vertical alignment tasks.
Compact, Lightweight Form Factor: At just 2.2 kg, it is easy to integrate into multi-axis systems, optical benches, or production lines without adding excessive mass.
Fail-Safe Holding Force: 15 N holding force in vertical orientation prevents load drop during power outages, protecting delicate workpieces.
Versatile Motion Capability: Combines 3 linear + 3 rotational axes in a single platform, eliminating the need for stacked stages and reducing system complexity.

. Typical Applications

1. Optical Alignment & Testing

   Used for precise alignment of lenses, prisms, and optical systems, as well as for beam steering and focusing in laser systems. The sub-arc-second rotational resolution ensures accurate angular positioning for optical path alignment.
2. Semiconductor & Microelectronics Manufacturing

   Applied in wafer inspection, die bonding, and component alignment processes. The high repeatability and low backlash support the tight tolerances required for semiconductor assembly and testing.
3. Precision Metrology & Calibration

   Serves as a multi-axis reference platform for calibrating coordinate measuring machines (CMMs), sensors, and optical measurement instruments, leveraging its high linear and rotational accuracy.
4. Biomedical & Life Sciences

   Used in microscopy systems (e.g., confocal microscopy) for precise sample positioning and focusing, as well as in micro-manipulation tasks requiring controlled multi-axis motion.
5. Industrial Automation & Robotics

   Integrated into automated assembly lines for precise part positioning, especially in tasks requiring combined linear and angular adjustments (e.g., screw tightening, component fitting).