E-HEX-90.6.60.60 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages

Features:
High precision, can be assembled, can be customized, light aperture 460mm

Delivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path.