E-NZH-630 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform

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Product Highlights

The E-NZH-630 6-axis displacement stage is a high-precision motion solution designed for demanding industrial and scientific applications, combining exceptional positioning accuracy, multi-axis flexibility, and robust mechanical performance.

Multi-Axis Motion Control

It offers comprehensive 6-degree-of-freedom (6-DOF) control, including linear (X/Y/Z) and rotational (θX/θY/θZ) movements. With travel ranges of ±50 mm (X/Y), ±25 mm (Z), ±15° (θX/θY), and ±30° (θZ), it delivers full spatial manipulation for complex alignment tasks.
Ultra-High Precision & Repeatability

Built for precision-critical workflows, the stage features repeatability down to ±0.1 µm (Z-axis) and ±1.5 µrad (θX/θY), with minimum step resolutions as fine as 1 µm (linear) and 10 µrad (rotational). Low backlash (0.2 µm for Z-axis, 4–8 µrad for rotational axes) ensures consistent, drift-free positioning.
Balanced Speed & Dynamic Performance

Powered by permanent magnet synchronous motors, the stage achieves a maximum linear speed of 60 mm/s (typical: 40 mm/s) and rotational speed up to 700 mrad/s (typical: 480 mrad/s), enabling efficient alignment cycles without sacrificing accuracy.
Reliable Load & Holding Capability

It supports a maximum load of 10 kg (horizontal orientation) / 3 kg (any direction), with a power-off holding force of 15 N / 5 N to secure positions during power interruptions, ensuring safety in sensitive setups.
Robust Construction & Versatile Operation

Constructed from stainless steel and aluminum, the stage offers durability and stability across a wide operating temperature range of -10°C to +50°C. Its compact 12 kg design makes it suitable for integration into various systems without excessive footprint.

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Product Detail

Specification

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key Applications

The E-NZH-630 6-DOF stage is ideal for applications requiring precise, multi-axis alignment and positioning:

Optical & Photonics Alignment: Precision assembly of lenses, mirrors, and fiber-optic components, including beam path alignment and optical system calibration.
Semiconductor & Microelectronics Manufacturing: Wafer probing, die bonding, and component alignment in micro-assembly processes.
Precision Metrology & Inspection: High-accuracy positioning for coordinate measuring machines (CMMs), 3D scanning, and quality control of micro-parts.
Biomedical & Life Sciences: Micro-manipulation of samples, cell imaging systems, and lab automation requiring controlled multi-axis motion.
Aerospace & Defense: Alignment of optical sensors, calibration of precision instruments, and testing of aerospace components.

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Specification	E-NZH-630		Unit
Motion & Positioning	Travel Range X, Y	±50	mm
	Travel Range Z	±25	mm
	Travel Range θX, θY	±15	°
	Travel Range θZ	±30	°
	Minimum Step Resolution X, Y	1.5	µm
	Minimum Step Resolution Z	1	µm
	Minimum Step Resolution θX, θY, θZ	10	µrad
	Backlash X, Y	1.5	µm
	Backlash Z	0.2	µm
	Backlash θX, θY	4	µrad
	Backlash θZ	8	µrad
	Repeatability X, Y	±0.3	µm
	Repeatability Z	±0.1	µm
	Repeatability θX, θY	±1.5	µrad
	Repeatability θZ	±3	µrad
	Max Speed X, Y, Z	60	mm/s
	Max Speed θX, θY, θZ	700	mrad/s
	Typical Speed X, Y, Z	40	mm/s
	Typical Speed θX, θY, θZ	480	mrad/s
Mechanical Performance	Load Capacity (Horizontal / Any Direction)	10/3	kg
	Holding Force (Power-Off, Horizontal / Any Direction)	5/15	N
	Motor Type	Permanent Magnet Synchronous Motor	-
General	Operating Temperature Range	-10 ~ +50	°C
	Materials	Stainless Steel, Aluminum	-
	Mass	12	kg