Products
VCM175-Z50 Ultra-High Precision Vertical Linear Motor Stage
Key Features
- High-Force Voice Coil Motor: Rated 56 N continuous thrust, with peak 300 N, supporting both fast response and stable holding force.
- Ultra-High Encoder Resolution: Sin/cos encoder with 4.88 nm resolution (other higher resolutions optional), enabling sub-nanometer scale feedback.
- Fine Positioning Capability: Minimum step size down to 10 nm when paired with a nanopwm or linear driver, for ultra-fine adjustment.
- Long Travel & Stability: 50 mm travel range with ±200 nm repeatability and ±500 nm positioning accuracy.
- Superior Flatness & Straightness: 5 µm flatness and 2 µm straightness, ensuring consistent precision across the full travel range.
- High Speed & Load: Maximum speed of 100 mm/s, supporting a maximum load of 12 kg (with pneumatic constant-force spring balance).
Applications
This stage is ideal for applications requiring precise vertical motion, including:
- Semiconductor wafer inspection and probing
- Precision optical focusing and alignment
- Microscopy and metrology systems
- Laser machining and 3D printing
- Medical device assembly and testing
- Research labs requiring high-precision vertical positioning
| Specification | E-VCM175-Z50 |
| Motor type | Voice coil motor |
| Grating Resolution | Sin/Cos 4.88nm (higher resolutions optional) |
| Motor Thrust | Rated thrust: 56N, Peak thrust: 300N |
| Minimum Step Size [nm] | 10nm(matched with NanoPWM or linear driver) |
| Travel Range [mm] | 50 |
| Repeatablity [um] | ±200nm |
| Positioning Accuracy [um] | ±500nm |
| Flatness [um] | 5 |
| Straightness [um] | 2 |
| Maximum Speed [mm/s] | 100mm/s |
| Maximum Load [kg] | 12kg(Adopt pneumatic constant force spring balance) |
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