Products
E-EABT-D200 Economical Direct-Drive Air Bearing Rotary stage
Key Features
- High-Performance Motor: 3.2 Nm rated torque (6.72 Nm peak) with speeds up to 2200 rpm (analog signal) for fast, precise positioning.
- Ultra-High Encoder Resolution: 15744-line encoder provides 0.41 arcsec resolution, with an optional 1 Vpp output for enhanced resolution capabilities.
- Superior Repeatability: ≤ ±1 arcsec ensures consistent, reliable positioning for critical processes.
- High Load & Stiffness: 620 N max axial load, 306 N max radial load, supporting heavy payloads while maintaining rigidity.
- Exceptional Runout Control: Axial and radial runout < 0.6 µm guarantees true rotational alignment for precision measurements and machining.
- Low Air Consumption: Only 15NL/min, offering efficient, cost-effective operation in continuous-use environments.
Applications
Ideal for a wide range of demanding industrial and research applications requiring high-precision rotation, including:
- Semiconductor and electronics manufacturing (wafer inspection, metrology)
- Precision optical testing and alignment
- Coordinate measuring machines (CMMs)
- High-accuracy rotary scanning and 3D metrology
- Laboratory research and development
- Aerospace component testing and calibration
This stage balances premium performance with an economical design, making it a versatile solution for both high-volume production and specialized precision tasks.
| Specification | E-EABT-D200 |
| Motor Torque | Rated: 3.2 Nm, Peak: 6.72 Nm |
| Max Speed | 1200rpm（Analog signal） |
| Encoder Lines | 15744line |
| Encoder Resolution | 0.41sec（Optional 1 Vpp for higher resolution） |
| Repeatablity | ≤±1sec |
| Max Axial Load（5bar） | 620N |
| Max Radial Load（5bar） | 306N |
| Max Axial Stiffness （5bar） | 310N/um |
| Max Radial Stiffness（5bar） | 150N/um |
| Max Axial Runout* | <0. 6um |
| Max Radial Runout * | <0.6um |
| Total Air Consumption | 15NL/min |
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