XY stage provides high speed and 10-nm resolution

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XY stage provides high speed and 10-nm resolution

A new integrated XY stage — part of its compact high-speed positioning stage roster.

All of these positioning stages are powered by ultrasonic piezo-linear motors — patented motors that deliver smooth motion, high resolution and rapid step and settle response

 

EMSLM-120X100-INXY-E50 Inverted Microscope Linear Motor Stage1

Also featured on the motors is a self-clamping drive to lock the platform in place without power — useful in applications where position stability and low power consumption matter.
Long travel and compact build complement wide dynamic range
The ELMTMINI XY stage provides 0.8 in. travel per axi, with a footprint of 42 x 42 mm (1.6 x 1.6 in.). Its low profile of 21 mm and miniaturized design allows for easy integration into tight spaces. In addition to high resolution (10 nanometer linear encoders) it provides high speed motion up to 200 mm/sec and rapid step-settle performance.

High-end motion controllers and software package
To take advantage of the operating principle, providing superior dynamic performance with settling times in the millisecond range while maintaining high resolution and smooth operation, ultrasonic motors benefit from advanced control strategies, such as automatic switchover between several static and dynamic PID parameter sets and adaptive frequency tracking. PI offers a number of ultrasonic motion controllers (available in desktop, rack-mount, and OEM configurations. An ASIC chip containing the motion control algorithms is also available for OEM customers. A comprehensive software package is included: drivers and example programs for LabVIEW, dynamic libraries for Windows and Linux, MATLAB are available. Interfaces include TCP/IP, USB, RS-232 and analog.
Ultrasonic mini linear stage family specifications
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Post time: Apr-12-2023