EABRX-M 200 Air Bearing rotation stage

Surface metrology, including the measurement of roundness, flatness, and form error

•Micro- and nanotomography

•Beamline and synchrotron research

•Precision manufacturing, including diamond turning, grinding and other high-performance machine tool

applications

•Optical alignment, inspection and calibration systems

•Engineered for Precision

•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performance

requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error

motion performance with high stiffness and load-carrying capabilities.

Product Detail

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Specification	Parameter
motor torque	0.7Nm rated 2.7Nm peak
Maximum speed	1000rpm
Encoder lines	15744line
Encoder resolution	0.41sec (The digital quantity corresponds to 0.1um, and a higher resolution of 1Vpp is optional)
Repeatability	≤±1sec
Axial maximum load (5bar)	1200N
Radial maximum load (5bar)	350N
Axial maximum rigidity (5bar)	480N/um
Radial maximum rigidity (5bar)	160N/um
axial runout*	<100nm
radial runout*	<100nm
Comprehensive air consumption	25NL/min