E-ABRX-M250 High precision Aerostatic Rotary Stage

Short Description:

Surface metrology, including the measurement of roundness, flatness, and form error

•Micro- and nanotomography

•Beamline and synchrotron research

•Precision manufacturing, including diamond turning, grinding and other high-performance machine tool

applications

•Optical alignment, inspection and calibration systems

•Engineered for Precision

•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performance

requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error

motion performance with high stiffness and load-carrying capabilities.

Send email to us

Product Detail

SPECIFICATION

Product Tags

Application Scenarios）

1. Precision optical manufacturing & testing: Laser processing, optical lens grinding, optical component alignment and calibration.
2. Microelectronics & semiconductor industry: Wafer detection, chip packaging, semiconductor device precision assembly.
3. Precision metrology: Coordinate measuring machine (CMM) auxiliary rotation, high-precision angular displacement calibration.
4. Aerospace & aviation: Aerospace component precision testing, aeroengine part micro-machining.
5. Advanced manufacturing: Ultra-precision CNC machine tool rotation unit, micro-nano processing equipment.
6. Scientific research experiment: Laboratory precision positioning, aerospace simulation test, material micro-measurement

Aerostatic Rotary Stage
- Air Bearing Rotary Stage
- Rotary Displacement Stage
- Air-Floating Rotary Table
- Aerostatic Rotary Platform
- Air Bearing Rotary Uni

Air-Floating Rotary Table

Previous: E-ABRTE-M100 Air Bearing rotation stage

Next: Linear motor performance testing and Measurement system LMPMS-II

Specification	E-ABRX-M250
motor torque	4.9 Nm rated, 11 Nm peak
Maximum speed	600rpm
Encoder lines	11840line
Encoder resolution	0.41 sec (digital value corresponds to 0.1 μm, 1 Vpp is optional for higher resolution)
Repeatability	≤1sec
Axial maximum load (5bar)	660N
Radial maximum load (5bar)	360N
Axial maximum rigidity (5bar)	480N/um
Radial maximum rigidity (5bar)	160N/um
axial runout*	<100nm
radial runout*	<100nm
Comprehensive air consumption	25NL/min