E-CPA-XY  (coplanar air bearing  XY Stage)

Products

E-CPA-XY (coplanar air bearing XY Stage)

Short Description:

The X-axis beam is made of alumina ceramics. Compared with marble beams, ceramic beams have better accuracy, stability and wear resistance.

 

 

 

 

 


Product Detail

Specification

Product Tags

 

 

 

 

 

 

 

 


  • Previous:
  • Next:

  • Specification | 300×300 400×400
    Motor type Three-phase iron core motor
    Grating resolution 1vpp Analog value can be subdivided up to 1nm (absolute value optional)
    X-axis motor thrust[N] Continuous 40N Peak 90N
    Y-axis motor thrust [N] Continuous 40N*2 Peak 90N*2
    Upper axis no-load acceleration [g] 1.5G
    Lower axis no-load acceleration [g] 1.5G
    Mini step length [nm] 10nm(With nanopwm or linear driver )
    Travel [mm] 300×300 400×400
    Repeat positioning accuracy [um] ±0.05 ±0.05
    Positioning accuracy [um] ±0.3 ±0.35
    Flatness [um] 1 1.5
    Straightness [um] 0.5 1
    pitch[urad] 10 10
    yaw[urad] 5 5
    Maximum speed [mm/s] 500mm/s
    Maximum load[kg] 30kg