Products
E-MCPA-XY （Small linear motor coplanar air bearing Stage
| Specification | | 100×100 | 200×200 |
| Motor type | Three-phase iron core motor | |
| Grating resolution | 1vpp Analog value can be subdivided up to 1nm (absolute value optional) | |
| X-axis motor thrust[N] | Continuous 40N Peak 90N | |
| Y-axis motor thrust [N] | Continuous 40N*2 Peak 90N*2 | |
| Upper axis no-load acceleration [g] | 1.5G | |
| Lower axis no-load acceleration [g] | 1.5G | |
| Mini step length [nm] | 10nm(with nanopwm or linear driver) | |
| Travel [mm] | 100×100 | 200×200 |
| Repeat positioning accuracy [um] | ±0.1 | ±0.1 |
| Positioning accuracy [um] | ±0.2 | ±0.2 |
| Flatness [um] | 1 | 1.5 |
| Straightness [um] | 0.5 | 1 |
| pitch[urad] | 10 | 20 |
| yaw[urad] | 10 | 20 |
| Maximum speed [mm/s] | 500mm/s | |
| Maximum load[kg] | 12kg | |
Write your message here and send it to us
