E-SVMMS60-X25 Micro Linear Stages

Short Description:

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

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Specification

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Specificaiton	E-SVMMS60-X25
Motor type thrust	DC Motor
resolution	0.003um（Control resolution) optional built-in linear grating version 1vpp resolution
travel	25mm
screw lead	1mm@ball screw 0.25mm@sliding screw
One-way repeat positioning accuracy	≤0.15um
Backlash	≤0.3um
Minimum step length	50nm
Flatness	≤±2um
Straightness	≤±2um
Maximum speed	≥20mm/s
Maximum load	≥3kg
Structural material and surface treatment	Aluminum alloy hard anodizing