Products
Non-contact air bearing 360° continuous high-speed direct drive EG-ZAR Series a high-performance air-bearing direct-drive rotary table ，
Product Overview
TheEG- ZAR series is a high-performance air-bearing direct-drive rotary table, a high-precision 360° continuous rotary table. It employs direct-drive control by a rotary motor combined with an air bearing design, providing users with superior dynamic performance and arcsecond-level positioning accuracy. In addition to market-leading axial, radial, and tilt error motion performance, the ZAR series air-bearing rotary tables also possess excellent rotary absolute positioning accuracy, repeatability, and load capacity, and are easily integrated into multi-axis motion systems. The ZAR series has a maximum speed of 6000 rpm and can provide flexible customization solutions to meet customer applications.
Application Scenarios
The EG-ZAR series rotary stages are air-bearing direct-drive rotary stages that combine arcsecond-level positioning accuracy with high dynamic performance. They can be applied to the following scenarios:
Measurement and Inspection
Biological Sample Processing and Observation
Ink Thickness Measurement
Precision Manufacturing
Optical Alignment, Inspection, and Calibration Systems
|
Model |
EG-ZAR150 |
EG-ZAR250 |
|
|
Travel |
360° 连续 |
||
| Accuracy① | ±2 arc sec | ||
| Repeatability① | ±1 arc sec | ||
| Axial Error Motion | 200 nm | 300 nm | |
| Radial Error Motion | 200 nm | 300 nm | |
| Continuous Torque | 3.5 N.m | ||
| Peak Torque | 10.5 N.m | ||
| Stage Mass | 7.8 kg | 21.2 kg | |
| Max Load | Axial | 10 kg | 20 kg |
| Radial | 2 kg | 5 kg | |
| Maximum Speed② | 6000 rpm | 5400 rpm | |
| Maximum Acceleration | 5400 °/s2 | ||
| Resolution | 0.1 arc sec | ||
| Minimum Step① | 0.2 arc sec | ||
| In Position Stability① | ±0.2 arc sec | ||
| Operating Pressure④⑤ | 5.5bar(Dry air is recommended; water and oil should be filtered out; dust particles should be filtered to below 0.5μm. | ||
| Material | Aluminium | ||
| MTBF | 30000 HOURS | ||
