USP-Mx Ultra-High Precision Air Bearing Rotary Stages

Air-Floating Rotary Table

. High Rigidity & Robust Load Capacity

• Boasts superior axial stiffness up to 1320N/μm and radial stiffness up to 300N/μm (M250 model), delivering exceptional rigidity to resist deflection under heavy loads and maintain precision during dynamic operation.
• Supports a wide range of load capacities: axial load from 360N to 4320N and radial load from 120N to 720N, making it suitable for both light-weight high-speed tasks and heavy-duty industrial applications.
• Rigidity and load capacity are tested under 0.5MPa gauge pressure (center load condition), ensuring real-world performance matches specification.

High-Speed Rotation & Flexible Customization

• Offers a broad speed range, with the compact M80 model reaching a maximum speed of 15,000rpm, ideal for high-speed inspection, wafer processing, and micro-manufacturing.
• Equipped with direct drive motors or brushless motors (fully customizable) to match specific application requirements, eliminating gear backlash and enabling silent, maintenance-free operation.

• Low Friction, Zero Wear & Long Service Life

  • Utilizes advanced air bearing technology to create a completely non-contact, frictionless support between the rotor and stator, eliminating mechanical wear, lubrication needs, and particle generation.
  • Ensures ultra-smooth, vibration-free rotation, critical for high-precision optical inspection, semiconductor manufacturing, and metrology equipment where contamination and vibration are prohibited.
  • Significantly reduces maintenance costs and extends service life compared to traditional mechanical bearing rotary stages.

   Compact, Modular Design & Wide Compatibility

  • Features a compact, integrated mechanical design with a through-hole structure, easy to integrate into automated production lines, inspection systems, and scientific research equipment.
  • Available in 5 standard models (M80/M100/M150/M200/M250) with bearing diameters from 80mm to 250mm, covering a full range of application scenarios from micro-precision to heavy-duty industrial use.
  • Optimized air consumption (18L to 40L/min) ensures energy efficiency while maintaining stable air film support, reducing operational costs.

  • Additional Unique Features (English)

    • Non-Contact, Contamination-Free Operation: Perfect for cleanroom environments (semiconductor, biotech, optics) where mechanical contact and lubricants are forbidden.
    • Ultra-Low Motion Error: Minimizes tilt, wobble, and error motion, enabling sub-nanometer level motion accuracy for ultra-precision machining and metrology.
    • Customizable Solutions: Supports tailored motor types, encoder resolutions, and interface configurations to meet specific customer requirements.
    • High Stability Under Dynamic Loads: Maintains precision even during high-speed rotation and heavy load applications, ensuring consistent performance across all operating conditions.