μSCAN series of products Nano Scanning Stage μSCAN-1

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μSCAN-1

The μSCAN series scanning system is a high-performance integrated system recently launched by our company. The whole machine uses high-rigidity granite as the base, cooperates with high-performance linear motors and servo platforms, and is mainly used for high-precision scanning, processing, testing and other applications. The selection of standard stroke parameters supports fast delivery, which greatly reduces the combination defects caused by the customer’s unfamiliarity with the combination and the performance shortcomings caused by the unfamiliarity with the debugging.

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SPECIFICATION

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Main Features of μSCAN Series XY axis is composed of U1 series high-performance linear motor platform (labyrinth seal has good protection effect and no wearing parts and dust) The R-axis is a high-precision flat DD motor The Z-axis is equipped with U3 series high-precision servo motor platform (optional NFZ240 high-performance linear motor platform) The base is made of high-performance stone such as Jinan Blue or Indian Black, and the precision can be selected from 0 or 00 Frame and vibration isolation system can be selected according to application requirements The XY motion system is optimized to support fast start-stop and continuous tuning applications (10kg load, 2mm stroke motion plus tuning <30ms (movement time 20ms, settling time 5-8ms))*1

1 Rapid start-stop movement has high requirements on drive control and parameter setting, please consult the manufacturer for details *

2 The maximum speed is related to the stroke size, load and drive control system, please consult the manufacturer for specific requirements on speed

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Specification of axes	Y Axes	X Axes	R Axes	Z Axes
Model of Axes	U1LM320-XX	U1LM240-XX	DDR224	U3SVM210-XX
Travel range	100/200/300/400	100/200/300/400	360°	50/100/200/300
Incoder resolution	100nm	100nm	1sec	-
Repeatability	≤1um（±0.5）	≤1um（±0.5）	≤±1sec	≤3um（±1.5）
Maximum speed*2	1000mm/s	1000mm/s	4rps	200mm/s
Maximum load	50kg			30kg
Motor thrust	220N/440N	330N/660N	20Nm	-
Flatness of motion	≤±5um	≤±5um	≤5um	≤±5um