EG-DL130 Series of biaxial XY nanostages dual-axis XY positioning Stage which uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.

The EG-DL130XY series is a two-axis integrated nano-positioning platform that utilizes advanced linear motor drive technology combined with a high-precision crossed roller guide design to provide users with superior nanometer-level positioning accuracy and stability.

The DL130XY series boasts a maximum horizontal load of 10kg, a maximum speed of 800mm/s, and a maximum no-load acceleration of 1g. Its compact dual-axis integrated design reduces overall space occupation, facilitating equipment layout in limited spaces and improving space utilization. All strokes feature a compact overall height of only 85mm, allowing for flexible customization based on customer applications. Applicable Scenarios: The EG-DL130XY series dual-axis XY positioning platform features high precision and high dynamic performance, making it suitable for the following scenarios: Semiconductor manufacturing such as photolithography and wafer inspection; Optical component manufacturing and laser processing; Precision machine tools and industrial robots; Applications requiring ultra-precision dynamic error control, such as optical waveguide processing and gene sequencing line scanning; Measurement and inspection, surface roughness detection, and ultra-precision laser processing, requiring nanometer-level positioning accuracy in industrial and research projects.