Two-axis integrated linear motor positioning stage EG-DPL-XY SERIES

Short Description:

EG-DPL-XY SERIES Twp axis XY Linear motor stages

Performance Characteristics

⚫ Integrated Dual-Axis XY Linear Motor Motion Platform

⚫ Dual-motor drive for upper and lower axes, equipped with high-precision crossed roller guides

⚫ Low side height, minimal Abbe error

⚫ Flatness and straightness throughout the entire stroke less than ±2µm

⚫ Excellent dynamic performance, position error less than ±20nm at a constant speed of 1mm/s

⚫ Resolution 1nm, repeatability ±100nm to ±150nm, positioning accuracy ±200nm to ±400nm

⚫ In-situ stability ±3nm (equipped with high-spec grating and high-performance controller)

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Product Detail

SPEICIFICATION

Product Tags

The E-DPL-XY series is a high-performance two-axis integrated linear motor positioning platform designed for ultra-precision industrial and scientific research applications. It integrates dual-motor direct drive, crossed roller guides, and nanometer-level feedback technology, breaking through the performance bottlenecks of traditional single-axis motion platforms. The DPL-XY series has a maximum horizontal load of 15kg to 30kg, a maximum speed of 800mm/s, and a maximum no-load acceleration of 1g. This series adopts a modular design, covering standard strokes of 100mm×100mm, 200mm×200mm, 250mm×250mm, and 300mm×300mm, and can provide flexible customization solutions according to customer applications.

Applicable Scenarios

The DPL-XY series positioning platform features a long stroke, high precision, and high dynamic performance, making it suitable for:

the following scenarios:
* Applications requiring ultra-precision dynamic error control, such as optical waveguide processing and gene sequencing line scanning;
* Inspection processes, including semiconductor testing, measurement and inspection, and surface roughness detection;
* Industrial and research projects requiring nanometer-level positioning accuracy, such as ultra-precision laser processing.

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MODEL	EG-DPL-100XY	EG-DPL-200XY	EG-DPL-250XY	EG-DPL-300XY
Travel	100mm*100mm	200mm*200mm	250mm*250mm	300mm*300mm
Accurac y	±200 nm	±250 nm	±300 nm	±400 nm
Bi- Repeatability	±100 nm	±150 nm
Pitch	12 arc sec	15 arc sec	16 arc sec	18 arc sec
Yaw	6 arc sec	8 arc sec	10 arc sec	10 arc sec
Straightness	±1 µm	±1.5 µm	±2 µm
Flatness	±1 µm	±1.5 µm	±2 µm
Orthogonality	8 arc sec
Maximum S peed①	800 mm/s
Maximum Acceleration①	1.0 g
Continuous Force	48.8 N		48.8 N
Peak Force	340.8 N		340.8 N
Load Capacity-Horizontal	15 kg	20 kg	30 kg
Stage Mass (No Motor)	14 kg	28 kg	55 kg	70 kg
Resolution	1 nm
Minimum Incremental step②	5 nm
In Position Stability②	±3 nm
Material	aluminum
MTBF	30,000 Hours